本規(guī)范共分12章和3個附錄,主要內(nèi)容包括:總則,術(shù)語,基本規(guī)定,廠址選擇及廠區(qū)規(guī)劃,工藝設(shè)計,電氣及自動化,輔助設(shè)施,建筑結(jié)構(gòu),給水、排水和消防,采暖、通風(fēng)與空氣調(diào)節(jié),環(huán)境保護、安全和衛(wèi)生,節(jié)能、余熱回收等。

GB51034-2014······1

1 總 則······13

2 術(shù) 語······15

3 基本規(guī)定······16

4 廠址選擇及廠區(qū)規(guī)劃······17

4.1 廠址選擇······17

4.2 廠區(qū)規(guī)劃······18

5 工藝設(shè)計······21

5.1 一般規(guī)定······21

5.2 三氯氫硅合成和四氯化硅氫化······22

5.3 氯硅烷提純······23

5.4 三氯氫硅氫還原······24

5.5 還原尾氣干法回收······24

5.6 硅芯制備及多晶硅產(chǎn)品后處理······25

5.7 分析檢測······26

6 電氣及自動化······27

6.1 電氣······27

6.2 自動化······29

7 輔助設(shè)施······36

7.1 壓縮空氣站······36

7.2 制氮站······36

7.3 制氫站······37

7.4 導(dǎo)熱油······37

7.5 純水制備······37

7.6 制冷······40

7.7 蒸汽······40

8 建筑結(jié)構(gòu)······42

8.1 一般規(guī)定······42

8.2 主要生產(chǎn)廠房和輔助用房······44

8.3 防火、防爆······46

8.4 潔凈設(shè)計及裝修······48

8.5 防腐蝕······49

8.6 結(jié)構(gòu)設(shè)計······50

9 給水、排水和消防······55

9.1 給水······55

9.2 排水······55

9.3 廢水處理······56

9.4 循環(huán)冷卻水系統(tǒng)······56

9.5 消防······57

10 采暖、通風(fēng)與空氣調(diào)節(jié)······58

10.1 一般規(guī)定······58

10.2 通風(fēng)······58

10.3 空氣調(diào)節(jié)與凈化······60

10.4 防排煙······61

10.5 空調(diào)冷熱源······62

11 環(huán)境保護、安全和衛(wèi)生······64

11.1 環(huán)境保護······64

11.2 安全······64

11.3 衛(wèi)生······65

12 節(jié)能、余熱回收······66

12.1 一般規(guī)定······66

12.2 生產(chǎn)工藝······66

附錄A 地下管線與建(構(gòu))筑物之間的最小水平凈距······68

附錄B 地下管線之間的最小水平凈距······69

附錄C 主要房間空氣潔凈度、溫度、濕度······70

本規(guī)范用詞說明······72

引用標(biāo)準(zhǔn)名錄······73

附：條文說明······77

1 總 則······80

2 術(shù) 語······81

3 基本規(guī)定······82

4 廠址選擇及廠區(qū)規(guī)劃······83

4.1 廠址選擇······83

4.2 廠區(qū)規(guī)劃······84

5 工藝設(shè)計······86

5.1 一般規(guī)定······86

5.2 三氯氫硅合成和四氯化硅氫化······87

5.3 氯硅烷提純······88

5.4 三氯氫硅氫還原······88

5.5 還原尾氣干法回收······89

5.6 硅芯制備及多晶硅產(chǎn)品后處理······89

5.7 分析檢測······89

6 電氣及自動化······90

6.1 電氣······90

6.2 自動化······91

7 輔助設(shè)施······93

7.1 壓縮空氣站······93

7.2 制氮站······93

7.3 制氫站······93

7.4 導(dǎo)熱油······94

7.5 純水制備······94

7.6 制冷······94

7.7 蒸汽······94

8 建筑結(jié)構(gòu)······96

8.1 一般規(guī)定······96

8.2 主要生產(chǎn)廠房和輔助用房······98

8.3 防火、防爆······100

8.4 潔凈設(shè)計及裝修······102

8.5 防腐蝕······103

8.6 結(jié)構(gòu)設(shè)計······104

9 給水、排水和消防······106

9.1 給水······106

9.2 排水······106

9.3 廢水處理······107

9.4 循環(huán)冷卻水系統(tǒng)······107

9.5 消防······108

10 采暖、通風(fēng)與空氣調(diào)節(jié)······109

10.1 一般規(guī)定······109

10.2 通風(fēng)······109

10.3 空氣調(diào)節(jié)與凈化······112

10.4 防排煙······114

10.5 空調(diào)冷熱源······115

11 環(huán)境保護、安全和衛(wèi)生······117

11.1 環(huán)境保護······117

11.2 安全······117

11.3 衛(wèi)生······117

12 節(jié)能、余熱回收······119

12.1 一般規(guī)定······119

12.2 生產(chǎn)工藝······119